gA Multiple Quantum Well Fe2O3/Ga2O3 Fabricated Under Atmospheric Pressure by Mist Chemical Vapor Deposition Based on Leidenfrost Effecth
Toshiyuki Kawaharamura, Giang T. Dang, Noriko Nitta
2014 MRS Fall Meeting & Exhibit, (Hynes Convention Center, Boston, Massachusetts, USA, Dec. 1-5, 2014), O2.10, (Oral, 1, 16:45-17:00)
Presentation file
(released at 2014.11.29)
gHigh Mobility Atmospheric-Pressure-Processed IGZO TFT with AlOx/IGZO Stack Fabricated by Mist Chemical Vapor Depositionh
M. Furuta, T. Kawaharamura, T. Kaida, D. Wang
The 20th International Display Workshops, (Sapporo Convention Center, Sapporo, Japan, Dec. 4-6, 2013), AMDp1-11L, (Poster, 4, 13:40-16:40)
gSingle-crystalline ZnO Nanorods Fabricated by Mist Chemical Vapor Deposition for Optical Applicationsh
Chaoyang Li, Xin Li, Dapeng Wang, Toshiyuki Kawaharamura, Mamoru Furuta, Akimitsu Hatta
The 20th International Display Workshops, (Sapporo Convention Center, Sapporo, Japan, Dec. 4-6, 2013), FMC7-4, (Oral, 5, 17:50-18:10)
gReaction Mechanism for Fabrication of High Quality IGZO Thin Films Grown by Non-Vacuum Mist CVD with O3 Assistanceh
Toshiyuki Kawaharamura, Tadahiro Kaida, and Mamoru Furuta
2013 MRS Fall Meeting & Exhibit, (Hynes Convention Center, Boston, MA, Dec. 1-6, 2013), O5.04, (Oral, 3, 14:30-14:45)
gAluminum Oxide Passivation layer for Crystalline Silicon Solar Cells Deposited by non-Vacuum Mist CVDh
Toshiyuki Kawaharamura, Takayuki Uchida, Kenji Shibayama, Shizuo Fujita, Takahiro Hiramatsu, and Hiroyuki Orita
2013 MRS Fall Meeting & Exhibit, (Hynes Convention Center, Boston, MA, Dec. 1-6, 2013), GG3.21, (Poster, 2, 20:00-23:00)
gFabrication of Well-aligned ZnO Nanorods as Photoelectrode for Dye-sensitized Solar Cell Applicationh
Xin Li, Toshiyuki Kawaharamura, Dapeng Wang, Noriko Nitta, Hiroshi Furuta, Akimitsu Hatta, and Chaoyang Li
The 28th European Photovoltaic Solar Energy Conference and Exhibition (EU PVSEC 2013), (Parc des Expositions Paris Nord Villepinte, Paris, France, Sep. 30-Oct. 4, 2013), ***, (***, Sep. 30, ***)
gFabrication of Aluminum Oxide Thin Films by Solution-Source Non-Vacuum Process of Mist Chemical Vapor Deposition with Ozone Assistanceh
Takayuki Uchida, Toshiyuki Kawaharamura, Mamoru Furuta, Shizuo Fujita
2013 International Conference on Solid State Devices and Materials (SSDM 2013) (Hilton Fukuoka Sea Hawk, Fukuoka, Japan, Sep. 24-27, 2013), 8 Advanced Materials and Growth, P-3-2, (Oral, 26, 09:15-09:30)
Invited
gDevelopment and Physics of Mist CVD; Non-Vacuum-Based Thin Film Fabrication Technologyh
Toshiyuki Kawaharamura
2013 the Japan Society of Applied Physics & Material Research Symposium Joint Symposia (2013 JSAP-MRS) (Doshisha Univ, Kyotanabe, Kyoto, Japan, Sep. 16-20, 2013), E Functional Oxide Thin Films and heterostructures for Innovative Devices, 19p-M6-7, (Oral invited, 19, 15:45-16:15)
Presentation file
(released at 2013.09.26)
gFabrication of high quality AlOx thin films with high growth ratio by mist CVDh
Toshiyuki Kawaharamura, Takayuki Uchida, Mamoru Furuta, Masaru Sanada, Shizuo Fujita
2013 the Japan Society of Applied Physics & Material Research Symposium Joint Symposia (2013 JSAP-MRS) (Doshisha Univ, Kyotanabe, Kyoto, Japan, Sep. 16-20, 2013), H Smart Materials Design for Ultimate Functional Materials: Functional Core Concept, 18p-M4-4, (Oral, 18, 14:30-14:45)
Presentation file
(released at 2013.09.26)
gCharacteristics of metal oxide thin films and device fabricated by mist CVDh
Toshiyuki Kawaharamura
21th Annual International Conference on Composites or Nano Engineering (ICCE-21) (Tenerife, Canary Islands, Spain, July 21-27, 2013), 7c CHEM I, (Oral invited, 23, 18:30-18:54)
gHigh Mobility IGZO TFT fabricated by Solution-Based Non-Vacuum Mist Chemical Vapor Depositionh
Toshiyuki Kawaharamura and Mamoru Furuta
4th International Conference on Semiconductor Technology for Ultra Large Scale Integrated Circuits and Thin Film Transistors (Villard-de-Lans (Grenoble area), France, July 7-12, 2013), Poster reception and discussion, (Poster, 8, 20:00-21:30)
gEnhancing carrier mobility of IGZO TFT fabricated by Mist CVD with O3 assistanceh
Toshiyuki Kawaharamura, Takayuki Uchida, Dang Wang, Masaru Sanada, and Mamoru Furuta
The 40th International Symposium on Compound Semiconductors (ISCS 2013) (Kove Convention Center, Kobe, Japan, May 19-23, 2013), Tu B4-5, (Oral, 21, 17:45-18:00)
gMorphology Controlled Single Crystal ZnO Nanostructures Fabricated by a Novel Mist Chemical Vapor Depositionh
Chaoyang Li, Xin Li, Dapeng Wang, Toshiyuki Kawaharamura, Noriko Nitta, Mamoru Furuta, Akimitsu Hatta
Society for Information Display 2013 (SID 2013) (Vancouver Convention Center, Vancouver, British Columbia, Canada, May 21-24, 2013), 19.3: Phosphors and Quantum Dot LEDs, (Oral, 21, 16:20-16:40)
gOptical Properties of Nanostructured ZnO Films Influenced by Different Gas Ratio Deposition with Radio Frequency Magnetron Sputteringh
Chaoyang Li, Xin Li, Dapeng Wang, Toshiyuki Kawaharamura, Mamoru Furuta, and Akimitsu Hatta
The 19th International Display Workshops in conjunction with Asia Display 2012 (IDW/ADf12) (Kyoto, Japan, Dec, 4-7, 2012) FMC8-3 (Oral, 7, 9:40-10:00)
gSolution-Based Atmospheric Pressure Deposition Method for Oxide TFTsh
Mamoru Furuta, Toshiyuki Kawaharamura, and Dapeng Wang
The 19th International Display Workshops in conjunction with Asia Display 2012 (IDW/ADf12). (Kyoto, Japan, Dec. 4-7, 2012) FMC1-2 (Oral, 4, 14:40-15:00)
gFabrication of Oxide TFT with an IGZO/AlOx Stack by Solution-based Non-vacuum Mist Chemical Vapour Depositionh
Toshiyuki Kawaharamura and Mamoru Furuta
2012 MRS Fall Meeting & Exhibit, (Hynes Convention Center, Boston, MA, Nov. 25-30, 2012) Z9.30 (Poster, 27, 20:00-22:00)
gMist CVD as a Green Fabrication Process for Insulating Oxide Thin Filmsh
Toshiyuki Kawaharamura, Jinchun Piao, Takayuki Uchida, Tatsuya Toda, Mamoru Furuta, Chaoyang Li, Shigetaka Katori, Takashi Hirao, and Shizuo Fujita
2012 MRS Fall Meeting & Exhibit, (Hynes Convention Center, Boston, MA, Nov. 25-30, 2012) AA9.01 (Poster, 27, 20:00-22:00)
ga-InGaZnO Thin-Film Transistor with Non-Vacuum Processed InGaZnO/AlOx Gate Dielectric Stackh
M. Furuta, T. Kawaharamura, T. Toda, and W. Dapeng
Pacific Rim Meeting on Electrochemical and Solid-state Science (PRiME2012) (Hawaii Convention Center and the Hilton Hawaiian Village, Honolulu, Hawaii, USA, Oct. 7-12, 2012), 3047 (Oral, 8, 10:40-11:00)
gThin-Film Transistor Using Dielectrophoretic Assembly of Single-walled Carbon Nanotubesh
T. Toda, T. Kawaharamura, H. Furusawa, and M. Furuta
Pacific Rim Meeting on Electrochemical and Solid-state Science (PRiME2012) (Hawaii Convention Center and the Hilton Hawaiian Village, Honolulu, Hawaii, USA, Oct. 7-12, 2012), 3072 (Oral, 9, 16:30-16:50)
gA novel dye-sensitized solar cell using well-aligned ZnO nanorodsh
Chaoyang Li, Xin Li, Dapeng Wang, Toshiyuki Kawaharamura, Hiroshi Furuta, and Akimitsu Hatta
27th European Photovoltaic Solar Energy Conference and Exhibition (The 27th EU PVSEC) (Messe Frankfurt, Germany, Sep. 24-28, 2012), 1BV.8.33 (Poster, 25, 17:00-18:30)
gSelf-Organized Growth ZnO Based Nanorods for Photonic Device Applicationh
Chaoyang Li, Depang Wang, Xin Li, Toshiyuki Kawaharamura, Mamoru Furuta, and Akimitsu Hatta
The 12th International Meeting on Information Display (IMID2012) (EXCO, Daegu, Korea, Aug. 28-31, 2012), 16-2 (Oral invited, 29, 15:35-16:00)
gFloating Body Effects in High-mobility Oxide Thin-Film Transistorh
M. Furuta, D. Wang, J. Jiang, T. Kawaharamura, and C. Li
12th International Meeting on Information Display (IMID2012) (EXCO, Daegu, Korea, Aug. 28-31, 2012), 56-5 (Oral, 31, 12:10-12:30)
gMISTCVD for the Semiconductor Processingh
Toshiyuki Kawaharamura
The 20th Annual International Conference on Composites or Nano Engineering (ICCE-20) (RAMADA Beijing North, Beijing, China, July 22-28, 2012), 2b General1 (Oral, 24, 12:08-12:25)
gEffect of active layer thickness on drain current stress instability in InSnZnO thin-film transistorsh
Dapeng Wang, Jingxin Jiang, Toshiyuki Kawaharamura, Chaoyang Li, Mamoru Furuta, Shigekazu Tomai, Misa Sunagawa, Mami Nishimura, Emi Kawashima, Masashi Kasami, and Koki Yano
The 20th Annual International Conference on Composites or Nano Engineering (ICCE-20) (RAMADA Beijing North, Beijing, China, July 22-28, 2012), 4c Oxide2 (Oral, 24, 16:35-19:00)
gThickness effects on the structural and optical properties of ZnO films prepared by radio frequency magnetron sputteringh
Dapeng Wang, Toshiyuki Kawaharamura, Mamoru Furuta, Akimitsu Hatta, and Chaoyang Li
The 20th Annual International Conference on Composites or Nano Engineering (ICCE-20) (RAMADA Beijing North, Beijing, China, July 22-28, 2012), 3c Oxide1 (Oral, 24, 14:00-16:25)
gInfluence of substrate on zinc oxide nanostructrues grown by thermal annealingh
Xin Li, Chaoyang Li, Toshiyuki Kawaharamura, Dapeng Wang, Hiroshi Furuta, Mamoru Furuta, and Akimitsu Hatta
The 20th Annual International Conference on Composites or Nano Engineering (ICCE-20) (RAMADA Beijing North, Beijing, China, July 22-28, 2012), 4c Oxide1 (Oral, 24, 16:35-19:00)
gFabrication and Characterization of Thin-Film Transistor using Dielectrophoretic Assembly of Single-Walled Carbon Nanotubeh
Tatsuya Toda, Toshiyuki Kawaharamura, H. Furusawa, and Mamoru Furuta
19th ACTIVE-MATRIX FLATPANEL DISPLAYS AND DEVICES 2012 (AM-FPDf12) (Ryukoku Univ. Avanti Kyoto Hall, Kyoto, Japan, July 4-6, 2012), FPDp.P-29 (Poster, 5, 14:40-17:00)
gZnO Thin Film Stoichiometry Influent by Working Gas during Radio Frequency Magnetron Sputteringh
C. Li, D. Wang, Z. Li, T. Kawaharamura, and M. Furuta
19th ACTIVE-MATRIX FLATPANEL DISPLAYS AND DEVICES 2012 (AM-FPDf12) (Ryukoku Univ. Avanti Kyoto Hall, Kyoto, Japan, July 4-6, 2012), TFMDp.P-39 (Poster, 5, 14:40-17:00)
gStructural and Electrical Properties of Al2O3 Film Grown by Mist Chemical Vapour Depositionh
T. Kawaharamura, D. Wang, T. Toda, C. Li, and M. Furuta
19th ACTIVE-MATRIX FLATPANEL DISPLAYS AND DEVICES 2012 (AM-FPDf12) (Ryukoku Univ. Avanti Kyoto Hall, Kyoto, Japan, July 4-6, 2012), TFMDp.P-40 (Poster, 5, 14:40-17:00)
gElectrical Properties of Oxide TFT with an IGZO/AlOx Stack Grown by Solution-Based Non-Vacuum Mist Chemical Vapor Depositionh
T. Kawaharamura, D. Wang, and M. Furuta
SID International Symposium (SID2012) (BCEC, Boston, USA, June 5-8, 2012) P-147L (Poster, 7, 17:00-20:00)
gSynthesis and Photoluminescence Properties of Vertically Well-aligned Zinc Oxide Nanostructuresh
C. Li, D. Wang, T. Kawaharamura, Z. Li, N. Nitta, M. Furuta, and A. Hatta
SID International Symposium (SID2012) (BCEC, Boston, USA, June 5-8, 2012) P-71 (Poster, 7, 17:00-20:00)
gAmorphous InGaZnO Thin-film Transistor with solution-based Atmospheric Pressure Deposited IGZO/AlOx Gate Dielectric Stackh
M. Furuta, T, Kawaharamura, and D. Wang
8th International Thin-Film Transistor Conference, (2012) (Calouste Gulbenkian Foundation, Lisbon, Portgal, Jan. 30-31, 2012) Session 1 (Oral, 30, 11:15-11:30)
gMultiple-Annealing Process Effects on Fabrication of Well-Aligned ZnO Nanostructuresh
C. Li, D. Wang, T. Kawaharamura, Z. Li, and M. Furuta
The 18th International Display Workshops, IDW'11 (Nagoya Congress Center, Nagoya, Japan, Dec. 07 - 09, 2011), PHp-7 (Poster, Dec. 07 13:20-16:20), pp.84
gGreen processes of ZnO transparent conducting thin films with mist CVDh
Toshiyuki Kawaharamura, Hiroyuki Orita, Takahiro Shirahata, Takashi Hirao, and Shizuo Fujita
2011 MRS Fall Meeting & Exhibit (Hynes Convention Center, Boston, MA, USA, Nov. 28 - Dec. 2, 2011), M13.11 (Poster, Dec. 1 20:00-23:00), pp.205
gDevelopment of High Photoluminescence Nanostructured ZnO Thin film Phosphor at Low Temperatureh
Chaoyang Li, Dapeng Wang, Toshiyuki Kawaharamura, Mamoru Furuta, and Akimitsu Hatta
The 11th International Meeting on Information Display - IMID 2011 (KINTEX, Seoul, Korea, Oct. 11-15, 2011), 65-3: Luminescence and Phosphors VI (Oral, 14 14:20-14:45)
gEFFECTS OF THICKNESS ON THE OPTICAL PROPERTIES OF ZINC OXIDE FILMS PREPARED BY RADIO FREQUENCY MAGNETRON SPUTTERINGh
Dapeng Wang, Chaoyang Li, Toshiyuki Kawaharamura, Mamoru Furuta, Takashi Hirao, and Tadashi Narusawa
11th International Workshop on Plasma-Based Ion Implantation and Deposition - PBII&D 2011 (Harbin, China, Sept. 8-12, 2011), PA28O: Session C Functional Films (I) (Oral, 9, 14:25-14:40) pp.43-44
gCHARACTERIZATION OF HYDROTHERMAL BULK ZnO IMPLANTED AT ROOM TEMPERATURE WITH 60 keV Sn+ IONSh
Giang T. Dang, Toshiyuki Kawaharamura, Noriko Nitta, Takashi Hirao, Toshimasa Yoshiie, and Masafumi Taniwaki
11th International Workshop on Plasma-Based Ion Implantation and Deposition - PBII&D 2011 (Harbin, China, Sept. 8-12, 2011), P070P, (Poster, 9, 15:30-17:30), pp.107-108
gStudy on the behavior of mist droplets and the mechanism in the mist Chemical Vapor Depositionh
T. Kawaharamura, S. Fujita, and T. Hirao
15th Intl. Conference on II-VI Compounds - II-VI 2011 (Mayan Riviera, Mexico, Aug. 21-26, 2011), Thu-LNP01, (Poster, 25, 18:30-20:30), pp.90
gEffects of Thickness on the Structural and Optical Properties of ZnO:Zn Thin Films Prepared by Radio Frequency Magnetron Sputteringh
Dapeng Wang, Chaoyang Li, Toshiyuki Kawaharamura, Mamoru Furuta, Takashi Hirao, and Tadashi Narusawa
The 3rd International Symposium on Frontier Technology - ISFT 2011 (Kochi University of Technology, Kochi, Japan, July 29-30, 2011), A103-1: Electronic and Photonic Engineering (Oral, 30, 9:05-9:25)
gInfluence of annealing under reducing ambient on properties of ZnO thin films prepared by mist depositionh
T. Kawaharamura, H. Orita, T. Shirahata, A Yoshida, S. Fujita, and T. Hirao
38th International Symposium on Compound Semiconductors - ISCS 2011(Maritim proArte Hotel, Berlin, Germany, May 22-26, 2011), We-1B: Oxides and transport properties (Oral, 25, 9:00-9:15), pp.392-393
gEffects of multiple post-treatments on the structural and optical properties of ZnO thin filmsh
Dapeng Wang, Chaoyang Li, Toshiyuki Kawaharamura, Mamoru Furuta, Takashi Hirao, and Tadashi Narusawa
38th International Symposium on Compound Semiconductors - ISCS 2011(Maritim proArte Hotel, Berlin, Germany, May 22-26, 2011), P2.17, (Poster, 23, 15:30-17:00), pp.84-85
gEffect of Annealing on the Structural and Photoluminescence Properties of ZnO/Zn0.9Mg0.1O Heterostructuresh
C. Li, D. Wang, T. Kawaharamura, T. Matsuda, T. Hiramatsu, H. Furuta, M. Furuta, and T. Hirao
The 17th International Display Workshops - IDWf10 (Fukuoka International Congress Center, Fukuoka, Japan, Dec. 1-3, 2010), PH3-3 (Oral, 2 17:30-17:50)
gA Novel Solution-based Vapor-etching Technique: Mist-etchingh
쌴‘º •qK(Toshiyuki Kawaharamura)Aand •½”ö F(Takashi Hirao)
2010 MRS Fall Meeting & Exhibit (Hynes Convention Center, Boston, MA, USA, Nov. 28 - Dec. 3, 2010), G6.50 (Poster, Nov. 30 20:00-23:00)
gEffects of high pressure water vapor annealing on photoluminescent and structural properties of nano structured ZnO/ZnMgO multiple layers prepared by radio frequency magnetron sputteringh
Chaoyang Li, Dapeng Wang, Toshiyuki Kawaharamura, Hiroshi Furuta, Takahiro Hiramatsu, Mamoru Furuta, and Takashi Hirao
The 10th International Meeting on Information Display - IMID 2010 (KINTEX, Seoul, Korea, Oct. 11-15, 2010), 16-1: Special Properties and Applications of Phosphors (Oral, 12 15:10-15:30)
gSynthesis of High Quality SiO2 Film by Capacitively-Coupled Plasma CVD with Comb-Type Electrodes Franceh
Takahiro Hiramatsu, Tokiyoshi Matsuda, Toshiyuki Kawaharamura, Mamoru Furuta, Takashi Hirao, K. Kanetake, and Hirotaka Toyoda
63rd Annual Gaeous Electronics Conference and 7th International Conference on Reactive Plasmas - GEC & ICRP 2010 (MAISON DE LA CHIMIE, Paris, France, Oct. 4-8, 2010), CTP.00194 (Poster, 5 11:00-12:30)
gCapacitively Coupled Plasma Source with Comb-Type Electrodes for Uniform Plasma Processingh
Hirotaka Toyoda, K. Kanetake, Takahiro Hiramatsu, Tokiyoshi Matsuda, Toshiyuki Kawaharamura, Mamoru Furuta, and Takashi Hirao
63rd Annual Gaeous Electronics Conference and 7th International Conference on Reactive Plasmas - GEC & ICRP 2010 (MAISON DE LA CHIMIE, Paris, France, Oct. 4-8, 2010), CTP.00191 (Poster, 5 11:00-12:30)
gLow Temperature Post-annealing Effects on Structural and Optical Properties of Zn0.9Mg0.1O Thin Film Prepared by Radio Frequency Magnetron Sputteringh
D. Wang, C. Li, T. Kawaharamura, T. Matsuda, M. Furuta, T. Hirao, and T. Narusawa
The 17th international Workshop on Active-Matrix Flatpanel Displays and Devices - AM-FPD 10 (Multi-Purpose Digital Hall, Tokyo Institute of Technology, Tokyo, Japan, July 5-7, 2010), TFMDp P-25 (Poster, 6 15:20-17:20)
gCharacterization of ZnMgO/ZnO Thin Films Prepared by by Radio Frequency Magnetron Sputteringh
C. Li, D. Wan, T. Kawaharamura, M. Furuta, and T. Hirao
The Proceedings of the 17th international Workshop on Active-Matrix Flatpanel Displays and Devices - AM-FPDf10 (Multi-Purpose Digital Hall, Tokyo Institute of Technology, Tokyo, Japan, July 5-7, 2010), P-24 (Poster, 6 15:20-17:20)
gEffects of Deposition Pressure on Structural and Optical Characteristics of ZnMgO Thin Films Prepared by Radio Frequency Magnetron Sputteringh
Dapeng Wang, Chaoyang Li, Toshiyuki Kawaharamura, Tokiyoshi Matsuda, Takashi Hirao, and Tadashi Narusawa
The 37th International Symposium on Compound Semiconductors - ISCS 2010 (Takamatsu Symbol Tower, Kagawa, Japan, May 31-June 4, 2010), MoP56 (Poster, May 31 16:00-17:30)
gLow Temperature Annealing Effects on ZnO Thin Films Sputtering Deposited on [100] Silicon Substrateh
Chaoyang. Li, Tokiyoshi Matsuda, Toshiyuki Kawaharamura, Yoichiro Nakanishi, Keiji Ichinomiya, Hiroshi Furuta, Takahiro Hiramatsu, Mamoru Furuta, and Takashi Hirao
The 16th International Display Workshops - IDW f09, (World Convention Center Summit, Miyazaki, Japan, Dec. 9-11, 2009), PH1-4L (Oral, 10 10:10-10:30)
gComparison of different annealing gases effects on the optical emission properties of zinc oxide thin film deposited by radio frequency sputteringh
Chaoyang Li, Tokiyoshi Matsuda, Yoichiro Nakanishi, Keiji Ichinomiya, Mamoru Furuta, Takahiro Hiramatsu, Hiroshi Furuta, Toshiyuki Kawaharamura, and Takashi Hirao
22nd International Vacuum Nanoelectronics Conference - INVC 2009 (Hamamatsu, Japan, July 20-24, 2009), O5-2: FED II (Oral, 23 14:20-14:40)
gFabrication of High Efficient Green Emission Zinc Oxide Films at Low Temperature by Radio Frequency Magnetron Sputteringh
Chaoyang Li, Tokiyoshi Matsuda, Toshiyuki Kawaharamura, Hiroshi Furuta, Takahiro Hiramatsu, Mamoru Furuta, and Takashi Hirao
the Society for Information Display - SID 2009 (San Antonio, TX, USA, May., (2009),) P-191L: Late-News Poster, (Poster)
gHigh Quality SiO2 deposited at 150‹C by Inductively Coupled Plasma Chemical Vapor Deposition with Pulsed Substrate Biash
Takahiro Hiramatsu, Tokiyoshi Matsuda, Hiroshi Furuta, Hiroshi Nitta, Toshiyuki Kawaharamura, Chaoyang Li, Mamoru Furuta, and Takashi Hirao
The 16th International Workshop on Active-Matrix Flatpanel Displays and Devices - AM-FPD 09, (Nara Centennial Hall, Nara, Japan, July 1-3, 2009), 6-3: New Process for Poly-Si TFT (Oral, 3 11:25-11:45)
gFabrication of Directly Grown Vertically Aligned CNT Pattern Emitter on Glassh
Hiroshi Furuta, Toshiyuki Kawaharamura, K. Kawabata, Mamoru Furuta, Akimitsu Hatta, K. Ishii, K. Okada, T. Komukai, T. Morioka, Tokiyoshi Matsuda, Chaoyang Li, and Takashi Hirao
The 15th International Display Workshops - IDW f08 (Niigata Convention Center, Nigata, Japan, Dec. 3-5, 2008), FED3-2:CNT Emitters for FEDs (Oral, 5, 13:40-14:00)
gFormation of metal oxide nanoparticles from mist sources in a hot fine channelh
T. Kawaharamura and S. Fujita
15th International Workshop on Oxide Electronics (Stanley Hotel, Estes Park, Colorado, USA, Sep. 14-17, 2008), P2.40 (Poster, 16, 14:45-17:00)
gSubstrate Bias Voltage Influence on Optical and Structural Characteristics of Zinc Oxide Films Prepared by Radio Frequency Magnetron Sputteringh
Chaoyang Li, Tokiyoshi Matsuda, Takahiro Hiramatsu, Hiroshi Furuta, Toshiyuki Kawaharamura, Mamoru Furuta, and Takashi Hirao
The 15th International Display Workshops - IDWf08 (Niigata Convention Center, Nigata, Japan, Dec. 3-5, 2008), PHp-21 (Poster, 4, 9:00-12:00)
gAn approach for singlecrystalline zinc oxide thin film with fine channel mist CVD methodh
Toshiyuki Kawaharamura and Shizuo Fujita
34th Int. Symp. Compound Semiconductors (Kyoto, Japan, Oct. 15-18, 2007), ThE P14 (Poster, 18, 11:15-12:45)
gThe growth of singlecrystalline ZnO films on a-plane sapphire by fine channel mist CVD methodh
Toshiyuki Kawaharamura and Shizuo Fujita
14th Int. Workshop on Oxide Electronics (Jeju, Korea, Oct. 7-10, 2007) PII-55 (Poster, * **:**-**:**)
gMist-CVD growth of ZnO-based thin films and nanostructuresh
Toshiyuki Kawaharamura, Hiroyuki Nishinaka, Jian-Guo Lu, Yudai Kamada, Yoshio Masuda, and Shizuo Fujita
13th Int. Conf. II-VI Compounds (Jeju, Korea, Sept. 10-14, 2007), Th-P-8 (Poster, * **:**-**:**)
gFine channel mist chemical vapor deposition (FCM-CVD) as a novel technology for growth of ZnO thin filmsh
Tosiyuki Kawaharamura, Hiroyuki Nisinaka, Yudai Kamada, and Shizuo Fujita
4th Int. Workshop on ZnO and Related Materials (Giessen, Germany, Oct. 3-6, 2006) P130 (Poster, Oct. 4, 17:00-19:00)